An Efficient Geometric Algorithm For Extracting Structural Elements to Facilitate Automated MEMS Extraction

Micro-electro-mechanical systems (MEMS) are very small devices that contain both mechanical and electrical elements with sizes in the order of microns. Design cycle time is an important consideration in the development and introduction of MEMS devices in the market. To develop extraction tools for MEMS designs, we need geometric algorithms to analyze the spatial layout of the mechanical portion of the MEMS device and extract a net-list of mechanical components. Such extracted net-list of mechanical components can be combined with the electronic component net-list to provide the complete device schematic. A key step in the extraction of mechanical elements is classification of various portions of the layout into structural elements. Because MEMS designs consist of a large number of elements, computational efficiency of the underlying extraction algorithm is very important for it to work on complex devices. This paper describes an efficient geometric algorithm for extracting structural elements from spatial layout of MEMS designs. @DOI: 10.1115/1.1576429#